Detail

The core facility

nanofabrication STnano Facility

Head Manager of the core facility Hicham MAJJAD
Scientifical Manager Bernard DOUDIN
Technical Manager Hicham MAJJAD

UMR 7504 - IPCMS / Institut de physique et chimie des matériaux de Strasbourg, UMR 7515 - ICPEES / Institut de chimie et procédés pour l'énergie, l'environnement et la santé
CNRS, UNIVERSITE DE STRASBOURG

Website of the core facility

Cronenbourg Schiltigheim
Monosite

Service delivery
- to the academic community
- to the socio-economic world

Collaborations of research
- with the academic community
- to the socio-economic world

Affiliated institution of administrative supervision

CNRS
UNIVERSITE DE STRASBOURG

STnano facility is member of the National Network of Nanotechnology facilities. The platform has a dedicated 180 m2 ISO class 6 cleanroom area, including several ISO class 5 workspaces. A laboratory dedicated to electron beam lithography completes the platform. The platform has currently all the equipment for the nanofabrication of devices down to several tens of nanometers. STnano staff trains more than 30 users annually. STnano is a certified ISO 9001 : 2015 platform. Aims of STnano are:

basic or advanced training to nanofabrication processes
give access to state of art equipment
fostering partnerships with industry and research labs

Access website

Certifications and accreditations

Expertises

Scientific expertise

Spintronic
Molecular electronic
Nanomagnetism
2D Materials
Multiferroïcs
Microfluidic
Nanofab for health

Technical expertise

Ebeam Lithography
Laser Lithography
Thin films
Etching
Electrical Caracterisation
Microscopy (optical and SEM)
Lab on chip
Back end

Resources

Main equipments

Ebeam Lithography
Direct writing Lithography
Thin films deposition (metals and dielectrics)
Reactive Ion Etching (fluorine)
Caracterisation (AFM, Profilometer, 4 probes system)
Back end (wire bonding, dicing saw)

Specific rooms

Salle propre/blanche

Software resources / Data bases

Cadence
Layout Editor
ZEN Core
Elphy+
Nanoscope Analysis

Examples of service delivery

Réalisation de capteurs sur substrats d'ITO
Réalisation de puces microfluidiques (Lab On Chip)

Recent collaborative projects

RANGE

Regional network of high-end facilities in the field of micro & nanotechnology

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