Detail
The core facility
nanofabrication STnano Facility
- Hicham MAJJAD
- Bernard DOUDIN
- Hicham MAJJAD
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- with the academic community
- to the socio-economic world
STnano facility is member of the National Network of Nanotechnology facilities. The platform has a dedicated 180 m2 ISO class 6 cleanroom area, including several ISO class 5 workspaces. A laboratory dedicated to electron beam lithography completes the platform. The platform has currently all the equipment for the nanofabrication of devices down to several tens of nanometers. STnano staff trains more than 30 users annually. STnano is a certified ISO 9001 : 2015 platform. Aims of STnano are:
basic or advanced training to nanofabrication processes
give access to state of art equipment
fostering partnerships with industry and research labs
Certifications and accreditations
Expertises
Scientific expertise
- Spintronic
- Molecular electronic
- Nanomagnetism
- 2D Materials
- Multiferroïcs
- Microfluidic
- Nanofab for health
Technical expertise
- Ebeam Lithography
- Laser Lithography
- Thin films
- Etching
- Electrical Caracterisation
- Microscopy (optical and SEM)
- Lab on chip
- Back end
Resources
Main equipments
- Ebeam Lithography
- Direct writing Lithography
- Thin films deposition (metals and dielectrics)
- Reactive Ion Etching (fluorine)
- Caracterisation (AFM, Profilometer, 4 probes system)
- Back end (wire bonding, dicing saw)
Specific rooms
- Salle propre/blanche
Software resources / Data bases
- Cadence
- Layout Editor
- ZEN Core
- Elphy+
- Nanoscope Analysis
Examples of service delivery
- Réalisation de capteurs sur substrats d'ITO
- Réalisation de puces microfluidiques (Lab On Chip)
